HITACHI 超高解析場發射掃描電子顯微鏡 Regulus 系列
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超高解析度冷場發射掃描式電子顯微鏡 SU8200 系列
Ultra-high Resolution Scanning Electron Microscope SU8200 Series
Regulus系列採用了一種新型冷場發射（CFE）槍，專為低加速電壓下的高解析度成像而優化。 這種 CFE槍可以將高解析度影像放大到200萬倍。
操作者使用功能也得到了增強，使用者可以充分利用該系列的進階功能，包括協助偵測系統的操作以分析各種類型的材料以及設備維護等功能。
特點
* Regulus8100: 0.8 nm/1 kV
Innovative Cold Field Emission Gun with Unmatched Resolution and Beam Stability
This novel CFE gun employs a Hitachi patented "Mild flashing" technique and a new vacuum system which greatly minimizes gas molecule deposition on the emitter tip. The emitter always operates in a "clean" state, and emission current and beam stability are significantly improved. The result is the ultimate SEM electron source offering high S/N, stability, and uncompromising resolution performance at low acceleration voltages. Further, these enhanced performance capabilities open a new gateway for low voltage elemental microanalysis.
SU8200 system features include a new top detector filtering system for enhanced electron detection specificity. Fine contrast differentiation is now achieved by selectively filtering inelastic scattering electrons and directly detecting specific energy back scattered electrons. This selective filtering is particularly powerful for enhancing material contrast at low acceleration voltages. Vibration control measures for the stage and chamber, and optimization of the optical system contribute to the high resolution system performance of 0.8 nm at 15 kV and 1.1 nm at 1 kV.
Features
Ultra-high Resolution Scanning Electron Microscope SU8200 Series
- 創新 CFE 電子槍可提供更明亮的低電壓高解析影像以及更穩定的元素分析
- 解析度：1.1 nm / 1 kV, 0.8nm / 15 kV
- 絕佳的高真空，減少污染樣品
- 選購的Top Filter偵測器可提供較佳的對比
- 標準樣品室：5軸自動樣品台
X : 0~50mm Y : 0 ~ 50mm - 大型樣品室：5軸自動樣品台
X : 0~110mm Y : 0 ~ 110mm - Regulus樣品室：5軸自動樣品台
X : 0~110mm Y : 0 ~ 80mm
Regulus系列採用了一種新型冷場發射（CFE）槍，專為低加速電壓下的高解析度成像而優化。 這種 CFE槍可以將高解析度影像放大到200萬倍。
操作者使用功能也得到了增強，使用者可以充分利用該系列的進階功能，包括協助偵測系統的操作以分析各種類型的材料以及設備維護等功能。
特點
·新型冷場發射（CFE）槍針對低電壓，高分辨率成像進行了優化，使得低加速電壓條件下兼備高解析度和分析的最佳性能
* Regulus8220/8230/8240: 0.7 nm/1 kV* Regulus8100: 0.8 nm/1 kV
·最大放大倍數從100萬倍增加到200萬倍
·使用者進階協助功能，以確保高性能影像取得
Innovative Cold Field Emission Gun with Unmatched Resolution and Beam Stability
This novel CFE gun employs a Hitachi patented "Mild flashing" technique and a new vacuum system which greatly minimizes gas molecule deposition on the emitter tip. The emitter always operates in a "clean" state, and emission current and beam stability are significantly improved. The result is the ultimate SEM electron source offering high S/N, stability, and uncompromising resolution performance at low acceleration voltages. Further, these enhanced performance capabilities open a new gateway for low voltage elemental microanalysis.
SU8200 system features include a new top detector filtering system for enhanced electron detection specificity. Fine contrast differentiation is now achieved by selectively filtering inelastic scattering electrons and directly detecting specific energy back scattered electrons. This selective filtering is particularly powerful for enhancing material contrast at low acceleration voltages. Vibration control measures for the stage and chamber, and optimization of the optical system contribute to the high resolution system performance of 0.8 nm at 15 kV and 1.1 nm at 1 kV.
Features
- Innovative CFE gun yielding ultra bright, stable probe current for high-resolution, low kV observations and elemental analyses
- High resolution performance (1.1 nm / 1 kV, 0.8 nm / 15 kV)
- Ultra-high vacuum gun and sample chambers to minimize contamination
- Optional Top Filter detection system for fine material contrast differentiation
